MEMS solutions from Oxford Instruments
With the MEMS industry expected to see double digit growth between 2009 and 20141, the development and commercialisation of new MEMS applications is becoming a reality.
Traditional devices such as accelerometers, gyroscopes and microphones continue to see increased adoption in many consumer electronics, displays and automotive applications.
The reality is that MEMS can provide a solution where there is a requirement for a device or sensor to be miniaturised2. Devices emerging in the R&D phase include energy harvesting; speakers; RFID; pico projectors; oscillators; micro fuel cells; and autofocus technologies amongst others3.
Oxford Instruments Plasma Technology continues to provide technologies that address existing and emerging applications in the MEMS market. With a broad process and application portfolio our technologies enable many of the applications identified today and those of tomorrow.
1. (isuppli corp Semicon West 2010), 2. (A.M. Fitzgerald and Associates, September 2006), 3. (Yole Developpment Semicon West 2010)
Process Technologies offered by Oxford Instruments in this market sector include:
- Deep silicon etching using a switched (Bosch) process or cryo technology
- Plasma Enhanced Chemical Vapour Deposition (PECVD)
- Atomic Layer Deposition (ALD)
- Magnetron sputter deposition