Cryogenic Vacuum Pumps

Cryoplex10 vacuum pump

We specialise in the manufacture and repair of cryogenic vacuum pumps, cryo-coolers (refrigerators) and helium compressors for semiconductor, optical coating, linear accelerators, medical equipment and R&D applications.

You can find just what you need from our range of products and support services.

  • New Equipment - cryopumps, compressors, and cryocoolers.
  • Refurbishment Services - a broad range of repair and refurbishment services - whatever brand of cryo-components you have, we offer fully warranted refurbishment, often with off-the-shelf availability.
  • Comprehensive range of accessories for the installation of whole systems and a complete range of spare parts to repair cryopumps and compressors.

Contact us with your enquiry:

Sales
4114 Todd Lane,
Austin, Texas 78744, USA.
Tel: +1-800-611-8871

512 441 6893 
Fax: +1 512 443 6665 
Email: cryo-sales@oxinst.com

 Support
4114 Todd Lane,
Austin, Texas 78744, USA.
Tel:+1-800-404-1055

512 441 6893 
Fax:+1 512 443 6665 
Email: cryo-support@oxinst.com

Choose a product
Cryo-Plex 10 Cryopump
 : Generally considered the most efficient cryopump design
Cryo-Plex 16 Cryopump
 : Standard cryopump in use on larger box-coating systems
Cryo-Plex 8 Cryopump
 : Standard cryopump for clean, oil free high vacuum pumping
Cryo-Plex 8LP Cryopump
 : Standard cryopump configuration for semiconductor tools
Contact Us

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Online Quote Catalogue
Cryopump Catalogue
On-line catalogue offers an extensive range of cryogenic products, spare parts, accessories and consumables

Related Products

Downloads And Links

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Austin brochure
Cryogenic Pumps and Compressors
Helium Compressors
Ultra high purity helium to single or multiple pumps
Support
Cryopump repair and refurbishment