Flexible Configurations
Standard inlet array configurations available as ANSI, ISO,Conflat ® and full UHV.
Power a single or two CryoPlex – 10 cryopumps with the M600 Helium Compressor reducing space, power and maintenance making this and ideal package for large chamber applications requiring multiple cryopumps.
Industry Standard Designs
Austin Scientific Cryo-Plex cryopumps and compressors are fully compatible and interchangeable with the Helix Cryotorr ® line of cryopumps and compressors making upgrades and repair exchanges seamless.