Genuine Oxford Instruments Spare Parts
Our Spares Kit Packages are designed with the aim of giving customers the ability to choose levels of system support tailored to their requirements. We recognise that our customers have varied requirements, and these packages enable our customers to personalise their support, saving unnecessary costs that are inevitably factored in to ‘standard’ packages.
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3 levels of Spares Kit Packages available
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Over time, components wear out and require replacement. Our Spares Kit Packages ensure you are always prepared
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Our Plasma, ALD, Ion Beam and HVPE products are manufactured using the highest quality precision-made components
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Fitting 3rd party parts can compromise system and process performance so we suggest always using genuine Oxford Instruments spare parts
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With spares located in strategic locations around the world, we can deliver parts to our customers when required
For full information on our Spares Kit packages please email plasmacs@oxinst.com or download our flyer.